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AlGaN/GaN MSM UV photodetector without and with BGaN back-barrier layer comparison study by SILVACO-TCAD

Benyettou, AichaHamdoune, AbedelkaderBenadda, BelkacemLachachi, Djamal
Indonesian Journal of Electrical Engineering and Computer Science (Sinta 1)Vol. 40 No. 1 (2025)1 November 2025
DOI10.11591/ijeecs.v40.i2.pp590-600

Abstrak

Using DevEDIT and atlas under SILVCAO-TCAD, we were able to achieve high photodetector metal-semiconductor-metal (MSM) AlGaN/GaN/BGaN performance with high electronic mobility. Our device demonstrated a sensitivity of 286 (I illumination/I dark) at Vanode 20V with an illumination current of 26 mA, a photocurrent of 1.56e-7 A at a wavelength of 0.350 µm, and an appropriate efficiency value of 87% without BGaN, and we also studied the influence of the boron B0.03Ga0.97N back-barrier layer. As a result, we obtain a sensitivity of 293,4 at Vanode 20V with an illumination current of 27 mA, a photocurrent of 1,85e-7 A at a wavelength of 0.350 µm, and an appropriate efficiency value of 90%. Additionally, this type of photodetector has been effectively created to detect UV light in the 100–450 nm range, and it may find value in both medical and military settings. Astronomical, medical diagnostics, environmental sensing, remote sensing, thermal imaging, optical signal detection, night vision cameras, missiles, and target tracking.

Kata Kunci

ElectronicsAluminum gallium nitrideBoron gallium nitrideGallium nitrideMSM photodetectorUV photodetector

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AlGaN/GaN MSM UV photodetector without and with BGaN back-barrier layer comparison study by SILVACO-TCAD | Indonesian Journal of Electrical Engineering and Computer Science | Publiora